You can locate these through the linde safety data sheet. Fluorine as this product is a gas, refer to the inhalation section. If user operations generate dust, fumes or mist, use ventilation to. Use this product in accordance with the material safety data sheet msds for 20% fluorine, balance nitrogen. Nitrogen fluoride, trifluoroamine, trifluoroammonia. Draeger tubes which are not classified as dangerous goods id. Product composition ranges shown are typical values for health, safety and environmental use and.
Wear splash resistant safety goggles with a faceshield. Substance any concentration shown as a range is to protect confidentiality or is due to batch variation. Material safety data sheet clipper herbicide this material safety data sheet msds serves different purposes than and does not replace or modify the epaapproved product labeling attached to and accompanying the product container. Osha, cma, ansi, canadian whmis standards and ec standards.
Ammonia has potentially explosive or violent reactions with interhalogens, strong oxidizers, nitric acid, fluorine, and nitrogen oxide. Gaseous nitrogen, vaporized from onsite liquid storage into a local distribution system, is used for a wide variety of applications, including blanketing, inerting, purging, stripping, and sparging. Methane is not listed in the iarc, ntp or by osha as a carcinogen or potential carcinogen. Material safety data sheet hydrofluoric acid, anhydrous msds number. Fluorine mixtures can be used mainly to clean nonplasma deposition chambers and diffusion furnace for siliconbased films. Product and company identificationproduct and company identification. Avoid sources of ignition such as flames, hot surfaces, sparks, and electrical equipment.
Mixtures with chlorine may explode on exposure to light. Within the production process of semiconductors, one process step is the etching process. It is the lightest halogen and exists as a highly toxic pale yellow diatomic gas at standard conditions. Relevant identified uses of the substance or mixture and uses advised against use of the substancemixture. Fluorine is a chemical element with the symbol f and atomic number 9. Supporting information investigation of fluorine and. Possibility of hazardous reactions hazardous polymerization does not occur. Versum materials supplies 10% and 20% f2n2 fluorine nitrogen gas mixtures in individual cylinders and bulk tube trailers globally. Improper storage, handling, or use of fluorine mixtures can result in serious injury andor property damage.
Within this step a structure is etched into the semiconductors. Other companies are charging thousands of dollars to set up accounts and. Have a trained person remove contact lenses if present contact lenses should be prohibited, put your eyes in the water flow and hold eyelids open while flushing. Cas 7782414 7727379 20% fluorine in nitrogen gas mixture fluorine contained in ient 2 nitrogen gas msds toxicity property. Nitrogen afrox south africa a member of the linde group. As this product is a gas, refer to the inhalation section. Fluorine fluorine nitrogen or xenon revision date jul2016 personal precautions evacuate personnel to safe areas. Assure that equipment is rated for pressure involved. Your new online msds binder is a place for you to store the material safety data sheets you need to deploy. The experimental and theoretical chemistry of nitrogenfluorine compounds is an area that has seen considerable renaissance over the past decade. To the best of our knowledge, this material safety data sheet conforms to the requirements of us osha 29 cfr 1910. Methane is inactive biologically and essentially nontoxic. Nitrogen trifluoride is an oxidizing compressed gas that has gained acceptance in a number of applications as a fluorinating agent.
Go to the nearest eye wash or clean source of water, open the water valve. Emergency telephone number with hours of operation. Nitrogen, compressed safety data sheet p4631 this sds conforms to u. Ensure adequate ventilation, especially in confined areas. Fluorine in argon, helium, krypton, neon andor xenon page 1 of 9 revision date.
Recycled halon 1 with nitrogen page 1 of 5 issue date. In particular but not exclusively, the chemistry of binary nf species is discussed. Decomposition products may include the following materials. Fluorine there are no additional ingredients present which, within the current knowledge of the supplier and in the concentrations applicable, are classified as hazardous to health or the environment and hence require reporting in this section. As fluorine is corrosive, toxic, and highly reactive. Our msds database is an easy to use, do it yourself tool, and best of all. The active fluorine is released only if sufficient energy is applied.
For more information, please refer to safety data sheets. Chronic effects intake of more than 6 mg of fluorine per day may result in fluorosis, bone and joint damage. Mixtures with oxygen may explode in presence of platinum catalyst. Health effects fluorine is highly toxic and must be handled with caution. Safety data sheet fluorine nitrogen 2080 revision date 02232018 p00000019114 version.
Aluminum fluoride aluminum fluoride material safety data sheet page 38 ingestion. Provide local exhaust or process enclosure ventilation system. Airopak f2n2 fluorine nitrogen mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Handling and storage advice on general occupational hygiene conditions for safe storage, including any incompatibilities eating, drinking and. Sulfuryl fluoride is a gas, which has no warning properties such as odor or eye irritation. Nitrogen trifluoride nf3 safety data sheet sds p4854 praxair, inc. Nitrogen trifluoride nitrogen trifluoride is a gas that is made of nitrogen and fluorine atoms. Occupational exposure limits, if available, are listed in section 8. Airopak f2n2 20% fluorine in nitrogen mixture versum. Avoid contact with strong oxidizers such as chlorine, fluorine, nitrogen tetraoxide, concentrated oxygen, and sodium hypochlorite or. As the most electronegative element, it is extremely reactive, as it reacts with all other elements, except for argon, neon, and helium among the elements, fluorine ranks 24th in universal abundance and th in.
Other companies are charging thousands of dollars to set up accounts and give you access to their msds online database. Nitrogen msds material safety data sheet for nitrogen n2 reference. Safety data sheet urea 4600 prilled ghs product identifier urea 46 other means of identification product type. Specific hazards arising from the chemical special protective equipment selfcontained breathing apparatus and full protective clothing must be worn in case of. Typical mixtures is composed 20% f2 in n2 balance, and filled at high pressure in cylinder or larger packages. Fluorine reacts slowly with water to form hydrofluoric acid.
Typical mixtures is composed 20% f 2 in n 2 balance, and filled at high pressure in cylinder or larger packages. Nitrogen trifluoride nf3 safety data sheet sds p4854. Relevant structural parameters for the fluorine and nitrogen doped ncm obtained from pdf analysis of total scattering data. Aluminum fluoride material safety data sheet aluminum. Accidental release measures use personal protection recommended in section 8, isolate the hazard area and deny entry to unnecessary and unprotected personnel. Immediately flush eyes with plenty of water, occasionally lifting the upper and lower eyelids. Inhalation at even low concentrations irritates the respiratory tract.
Irrigate eyes for at least 15 minutes with copious quantities of water, keeping eyelids apart and away from eyeballs during irrigation. The mixture, also called an airopak mix, contains 20% fluorine with the balance nitrogen. It is this property that makes it valuable as a nonreactive source of fluorine for etching and cleaning applications. The global electronics industry uses nitrogen trifluoride in its cleaning processes, because the gas outperforms other alternatives, is easier and safer to handle, and helps reduce greenhouse gas. The prediction of possible human effects is based in part on observations made on laboratory animals. Aluminum fluoride aluminum fluoride material safety data sheet page 18 chemical. Msds document numbern000 revision dated 03 sept 96 in an emergency, call chemtrec at 8004249300 us toll free or 7035273887.
Osha, cma, ansi, canadian whmis standards and ec standards section 1. Msds 20% fluorine in nitrogen gas mixture fluorine. Composition information on ingredients chemical name wt. Safety data sheet nitrogen trifluoride section 1 linde gas. Fluorine nitrogen mixtures fluorine mixtures can be used mainly to clean nonplasma deposition chambers and diffusion furnace for siliconbased films. It is predicted that persons exposed to sulfuryl fluoride will show little. This mixture of two permanent gases will not separate or. Anhydrous ammonia msds number 2001 revised april 23, 2008 10 pages. Other supply modes ranging from cylinders to onsite generation are also used to deliver nitrogen gas.
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